| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized irradiation device capable of accurately calculating an angle of a mirror, an irradiation method thereof, a measurement device, and a measurement method thereof.SOLUTION: The irradiation device according to an embodiment of the invention comprises a light source, a reflection mirror unit, an optical system and a calculation section. The reflection mirror unit, which includes a first reflection part and a second reflection part, can irradiate an object with first divided light, which is a part of light sent from the light source to the first reflection part, by reflecting the first divided light while changing a reflection angle thereof. The optical system divides light from the light source into the first divided light and second divided light so as to guide the second divided light to the second reflection part. The calculation section receives the second divided light reflected from the second reflection part, and can calculate the reflection angle of the reflection mirror unit. |
