| 摘要 |
PROBLEM TO BE SOLVED: To correct the water pressure component of a liquid material included in the pressure measured by a pressure sensor, thereby precisely calculating the flow rate or concentration of material gas.SOLUTION: The device includes: a storage container 2 for storing a liquid material; an introduction channel 3 for introducing carrier gas into the liquid material in the storage container 2; a discharge channel 4 for discharging from the storage container 2 a mixed gas of the carrier gas and the material gas obtained by vaporizing the liquid material; a measured-pressure receiving unit for receiving from a pressure sensor 5 the pressure of the carrier gas flowing through the introduction channel 4; and a computation unit 9 whereby the measured pressure received by the measured-pressure receiving unit is corrected using at least the water pressure of the fluid material, and the flow rate or concentration of the material gas flowing through the discharge channel 4 is calculated or controlled by using the corrected pressure obtained by the correction. |
