MASKLESS LIGHT EXPOSING DEVICE

摘要

The present invention relates to a maskless light-exposing device, which comprises: a light source generating a light; an optical modulation unit modulating the light according to a predetermined irradiation pattern; and a projection optical unit irradiating a beam spot array of the light from the optical modulation unit on a substrate. The projection optical unit includes a first optical unit receiving an incident light from the light modulation unit to include multiple first lenses; a second optical unit outputting the light on the substrate to include multiple second lenses; a hole array disposed between the first optical unit and the second optical unit to irradiate a beam spot array of the light from the first optical unit. At least one among the first lens and the second lens is a transflective lens.