| 摘要 |
<p>The present invention relates to a chamber for semiconductor deposition with a sealing clamp. The purpose of the present invention is to provide a chamber for semiconductor deposition with a sealing clamp capable of quickly and easily being closed/opened and improving a sealing property by using the sealing clamp when a cover of a CVD chamber is closed/opened. Using the present invention, the sealing property of the chamber cover can be improved by a simple operation. Thereby, the convenience of a worker is improved so working time can be reduced. The sealing property of the sealing clamp is superior to the sealing property of a screw.</p> |
