摘要 |
<p>Embodiments of the present invention relate to the structure of an optical mask where the provided optical mask includes a substrate and a reflective pattern part on which at least two reflective layers whose permeability is different from the substrate are stacked where a slope angle is made in the side surface on the stacked reflective layer and the surface on the substrate, and the range of the angle is between 80 and 90 degrees.</p> |