发明名称 OPTICAL MASK
摘要 <p>Embodiments of the present invention relate to the structure of an optical mask where the provided optical mask includes a substrate and a reflective pattern part on which at least two reflective layers whose permeability is different from the substrate are stacked where a slope angle is made in the side surface on the stacked reflective layer and the surface on the substrate, and the range of the angle is between 80 and 90 degrees.</p>
申请公布号 KR20150088100(A) 申请公布日期 2015.07.31
申请号 KR20140008501 申请日期 2014.01.23
申请人 LG INNOTEK CO., LTD. 发明人 HWANG, JOO HYUN;SEO, YOUNG DAE;SON, HYO WON
分类号 G03F1/38;H01L21/027 主分类号 G03F1/38
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