| 摘要 |
<p>Provided are methods and systems for a touch auto-calibration for robot placement of substrate in process modules. The touch auto-calibration allows for an automatic calibration of a robot end effector positioning with respect to an aligning base in a process module. The touch auto-calibration also allows for calibration of process modules at temperatures and pressures similar to a temperature and pressure experienced during production. The end effector has one or more aligning surfaces configured to align it with an aligning base upon contact with the aligning base. After contact, the position of the end effector and the calibrated position of the end effector during a pick up or a placement movement can then be determined. In some implementations, the positioning of the end effector as it transfers a substrate during production is based on a placement coordinate with the placement correction applied.</p> |
