A METHOD FOR MANUFACTURING FLEXIBLE MEMBRANE FOR HEAD OF CHEMICAL-MECHANICAL POLISHER USING BRUSHING TYPE OF COATING AND FLEXIBLE MEMBRANE MANUFACTURED BY THE SAME

摘要

Provided are a method for manufacturing a flexible membrane for the head of a chemical-mechanical polisher using a brushing type of coating and a flexible membrane manufactured by the same. A method for manufacturing a flexible membrane for the head of a chemical-mechanical polisher according to the present invention includes a step of applying a polymer coating layer on a flexible membrane by a brushing type; and a step of thermally hardening the polymer coating layer. A flexible membrane according to the present invention can improve the yield of a chemical-mechanical polishing process with superior flatness compared to an existing flexible membrane. Moreover, the flexible membrane for the head of a chemical-mechanical polisher can effectively reduce yield loss and process time due to the non-detachment of a wafer by easily detaching the wafer after a process.