发明名称 FILM DEPOSITION DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress film deposition by nozzles of sprayers (42) on both ends becoming unstable, in a film deposition device for forming a coat on an object (20) by spraying a raw material liquid from the nozzles of the plurality of sprayers (42) by an electrostatic spraying method.SOLUTION: Out of nozzles of a plurality of sprayers (42), applied voltage to the nozzles of the sprayers (42) on both ends located at both ends in a width direction of an object (20) is set to be lower than the applied voltage to the nozzles of the sprayers (42) in the middle located between the sprayers (42) on both ends.
申请公布号 JP2015136690(A) 申请公布日期 2015.07.30
申请号 JP20140011759 申请日期 2014.01.24
申请人 DAIKIN IND LTD 发明人 OKUMOTO MAMORU
分类号 B05B5/053;B05B5/025 主分类号 B05B5/053
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