PEELING METHOD IN MANUFACTURING PROCESS OF VARIOUS FLEXIBLE DEVICES

摘要

PROBLEM TO BE SOLVED: To provide a substrate peeling method having high process adaptability and high productivity at low cost.SOLUTION: The peeling method of peeling a substrate and a layer to be peeled by using light irradiated from a light source in a multilayer body formed of the substrate, a photothermal exchange film, and the layer to be peeled in this order includes: producing the photothermal exchange film derived from a compound having a molecular group having light absorption at a wavelength irradiated from the light source and a silanol group and/or an alkoxy silane group; and peeling the substrate and the layer to be peeled by irradiating the photothermal exchange film with light from the light source, transmitting the substrate.