| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ozone generating apparatus capable of stably producing ozone in a wide range of humidity environments (with an absolute humidity of 0 to 50 g/m), the ozone generation properties being changed only slightly even in a high-humidity environment.SOLUTION: An ozone generating apparatus 10 includes one or more electrode pairs 16 each containing two electrodes 20 arranged at a distance of a predetermined gap length Dg. In the ozone generating apparatus, ozone is generated when a source gas 12 flows at least between the two electrodes 20 of the electrode pair 16 and a discharge is generated between the two electrodes 20. Each electrode 20 contains a tubular dielectric body 32 having a hollow portion 30 and a conductive body 34 disposed in the hollow portion 30 of the dielectric body 32. The gap length Dg is less than 1.0 mm.</p> |
