CARBON NANOTUBE SHEET, SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING CARBON NANOTUBE SHEET, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a carbon nanotube sheet having a novel structure, capable of absorbing warpage or the like of a semiconductor element.SOLUTION: The carbon nanotube sheet includes: a carbon nanotube assembly 10 in which a plurality of carbon nanotubes 10a are arranged; a thermoplastic resin part 20 formed in a central region A of the carbon nanotube assembly 10; and an uncured thermosetting resin part 22 formed in an outer peripheral region B of the carbon nanotube assembly 10 so as to surround the thermoplastic resin part 20.