| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a tablet for vapor deposition capable of suppressing the thermal degradation of an organic material even when vapor-deposited over a long time, and a vacuum deposition apparatus for depositing the organic material using the tablet for vapor deposition.SOLUTION: A vapor deposition apparatus 10 for depositing an organic material on a material 46 to be deposited in a vacuum atmosphere comprises: a heating unit 34 arranging a tablet 40 for vapor deposition being a cylindrical body formed of the organic material; an evaporation chamber 12 heating and evaporating the tablet 40 for vapor deposition; a thin film deposition chamber 14 arranging the material 46 to be deposited; and a guide part 16 guiding the vapor of the organic material generated in the evaporation chamber 12 to the thin film deposition chamber. The heating unit 34 includes a flat plane part 35 or a conical slant, and the tablet 40 for vapor deposition is placed on the surface 35a of the flat plane part 35 of the heating unit 34 or the surface of the conical slant.</p> |
