Systems and Methods for Generating Backside Substrate Texture Maps for Determining Adjustments for Front Side Patterning

摘要

Techniques disclosed herein a method and system for generating texture maps for the backside of a substrate. The texture maps may be used to determine process adjustments (e.g., depth of focus) for subsequent processing of the front side of the substrate.

主权项

1. A texture mapping system, comprising:
a substrate chuck that can rotate a substrate around an axis, the substrate comprising a patterned front side surface that is opposite a backside surface; a profile sensor that can move across the backside surface of the substrate and generate a profile signal based, at least in part, on surface roughness on the backside surface of the substrate; a location controller that can generate a location signal based, at least in part, on locations of the profile sensor relative to the substrate; and a texture map component that can generate a texture map of the backside of the substrate based, at least in part, on the profile signal and the location signal, the texture map comprising an indication of surface roughness at locations on the backside of the substrate.