LIQUID MATERIAL VAPORIZATION APPARATUS

摘要

The present invention corrects the water pressure component of a liquid material included in the pressure measured by a pressure sensor, and thereby precisely calculates the flow rate or concentration of material gas, the present invention being provided with: a storage container (2) for storing a liquid material; an introduction channel (3) for introducing carrier gas into the liquid material in the storage container (2); a discharge channel (4) for discharging from the storage container (2) a mixed gas of the carrier gas and the material gas obtained by vaporizing the liquid material; a measured-pressure receiving unit for receiving from a pressure sensor (5) the pressure of the carrier gas flowing through the introduction channel (3); and a computation unit (9) whereby the measured pressure received by the measured-pressure receiving unit is corrected using at least the water pressure of the fluid material, and the flow rate or concentration of the material gas flowing through the discharge channel (4) is calculated or controlled using the corrected pressure obtained by the correction.