ADJUSTING DEVICE FOR ADJUSTING A PLURALITY OF PROCESSING UNITS IN SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING DEVICE COMPRISING ADJUSTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an adjusting device capable of adjusting various types of processing units of a substrate processing device in a short time.SOLUTION: The adjusting device comprises: a main operation device 71 which operates processing units U1 to UN and adjusts predetermined operation; terminal operation devices T1 to TN which operate the processing units U1 to UN and adjust predetermined operation; a network 75 which connects the processing units U1 to UN to the main operation device 71; and connection devices 81 and 82 which connect the terminal operation devices T1 to TN to the network 75 and disconnect the devices T1 to TN from the network 75. Each of the terminal operation devices T1 to TN is configured to operate at least one of the processing units U1 to UN.