发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR LAYER AND METHOD OF MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE
摘要 PROBLEM TO BE SOLVED: To improve photoelectric conversion efficiency of a photoelectric conversion device.SOLUTION: A method of manufacturing a semiconductor layer 3 comprises the steps of: forming a film which contains a group 11 element, a group 13 element, and a chalcogen element and in which at least the group 13 element is present in a state of an organic complex; heating the film in an atmosphere containing an alcohol to thermally decompose an organic component in the film, thereby forming a thermally decomposed film; and heating the thermally decomposed film to form the semiconductor layer 3 containing a group I-III-VI compound.
申请公布号 JP2015138832(A) 申请公布日期 2015.07.30
申请号 JP20140008749 申请日期 2014.01.21
申请人 KYOCERA CORP 发明人 YAMADA KAZUTERU
分类号 H01L31/06 主分类号 H01L31/06
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