| 摘要 |
A piezoelectric vibrator, wherein the capacitance is made relatively larger and the effect of stray capacitance is suppressed. A piezoelectric vibrator (120A) having first and second vibration units which vibrate at opposite phases relative to each other, wherein each of the first and second vibration units is provided with a silicon layer (220), a first piezoelectric layer (224) installed on the silicon layer (220), a first electrode (222) installed on the first piezoelectric layer (224), a second piezoelectric layer (225) installed on the first electrode (222) and polarized in the opposite direction from the first piezoelectric layer (224), and a second electrode (223) installed on the second piezoelectric layer (225). A first potential is applied on the first electrode (222) of the first vibration unit and the second electrode (223) of the second vibration unit, and a second potential is applied on the second electrode (223) of the first vibration unit and the first electrode (222) of the second vibration unit. |
