METHOD OF DETERMINING A MEASUREMENT SUBSET OF METROLOGY POINTS ON A SUBSTRATE, ASSOCIATED APPARATUS AND COMPUTER PROGRAM

摘要

Disclosed is a method of determining a measurement subset of metrology point locations which comprises a subset of potential metrology point locations on a substrate. The method comprises identifying a plurality of candidate metrology point locations from the potential metrology point locations. A change in the level of informativity imparted by said measurement subset of metrology point locations which is attributable to the inclusion of that candidate metrology point location into the measurement subset of metrology point locations is evaluated for each of the candidate metrology point locations. The candidate metrology point locations which have the greatest increase in the level of informativity attributed thereto are selected for inclusion into the measurement subset of metrology point locations.