| 摘要 |
PROBLEM TO BE SOLVED: To provide an estimation method whereby a concentration of carboxylic acid gas such as formic acid gas in a chamber of a soldering device can be safely measured at a real time, and a soldering device which can estimate a concentration of carboxylic acid gas in a chamber thereof.SOLUTION: In a method for estimating a concentration of carboxylic acid gas in a chamber into which the carboxylic acid gas for reaction is introduced, surface temperatures of same objects disposed in the chamber is measured at a same time by use of a thermometer (first thermometer), which can measure a temperature without reception of an influence of infrared absorption by carboxylic acid, and a radiation thermometer (second thermometer) which measures a temperature by infrared ray of a wavelength region which is absorbed by carboxylic acid. On the basis of a temperature difference (&Dgr;Tx) between the first thermometer and the second thermometer, the concentration of carboxylic acid gas in the chamber is estimated. A soldering device includes, a heating stage, means for introduction of mixed gas of inert gas and carboxylic acid gas, gas discharge means, a first thermometer and a second thermometer. |
