发明名称 CRUCIBLE AND VACUUM EVAPORATION SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To provide a crucible allowing for increasing the total housing amount of a material for evaporation, while preventing melting unevenness of the material for evaporation caused by heating of an electron beam, when being placed plurally on a circular stand.SOLUTION: A crucible 11 has a bottom wall part 30, and a peripheral wall part 32 standing from the circumference of the bottom wall part 30, and forming a storage space 32 having a fan shape in an upward view with an open upper side on the inner peripheral side, and can store a material for evaporation to be melted by an electron beam in the storage space 32.</p>
申请公布号 JP2015137409(A) 申请公布日期 2015.07.30
申请号 JP20140010814 申请日期 2014.01.23
申请人 STANLEY ELECTRIC CO LTD 发明人 MORITA MUTSUMI
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址