LASER DEVICE AND EUV-LIGHT GENERATION SYSTEM

摘要

This invention may include the following: a master oscillator that outputs laser light; a laser amplifier placed in the path of the laser light outputted by the master oscillator; and an adjuster placed in the path of the laser light whereby in the vicinity of the beam waist of the laser light amplified by the laser amplifier, the cross-sectional shape of the beam in a plane perpendicular to the axis of the light path is adjusted so as to be substantially circular.