| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analysis device which can set camera length by avoiding interference with a measuring object even in a case in which irregularities exist on the surface shape of the measuring object.SOLUTION: A back reflection X-ray analysis device comprises: an X-ray tube 1 which emits an X-ray to a sample 3; an imaging plate 2 which can detect a toric diffraction image formed by a diffraction X-ray by receiving the diffraction X-ray diffracting on the surface of the sample 3 when the X-ray is made incident on the sample 3; and camera length variable setting means which can set the camera length by selecting any one from a plurality of prescribed distances in a case of setting the camera length prescribed with a distance from an X-ray passage hole 5 of the imaging plate to a laser irradiation position O of the sample 3 in the optical axis direction of the X-ray emitted from the X-ray tube 1. The camera length variable setting means is constituted by using a distance sensor mechanism 10 of a triangular range-finding system. |
