Electrode Arrangement for a Barrier Plasma

摘要

An electrode arrangement for forming a dielectrically impeded plasma between an active surface of a flexible, planar electrode that can be connected to a high voltage source has a planar, flexible dielectric that forms the active surface which is connected to the planar electrode to form an electrode element where the electrode is completely covered towards to surface to be treated. The electrode arrangement is adaptable to irregular surfaces using a contact with surface elasticity for pressing onto the rear face of the electrode element facing away from the surface such that the electrode element by local deformation is automatically adapted to the irregularities.

主权项

1. An electrode arrangement for forming a dielectrical barrier plasma between an effective surface of the electrode arrangement and a surface which acts as a counterelectrode, comprising:
a flexible, flat electrode connectable to a high-voltage source; a flat, flexible dielectric which forms an effective surface, said dielectric is connected to the flat electrode to form an electrode element and completely covers the electrode with respect to a surface which is to be treated, wherein the electrode element has a rear face; an area-elastic pressure means for pressing on the rear face of the electrode element, which rear face is averted from the surface, in such a way that the electrode element can be automatically adapted to irregularities of the surface by local deformation.