| 发明名称 |
ANTIOXIDANT GAS BLOW-OFF UNIT |
| 摘要 |
An antioxidant gas blow-off unit includes: a base portion configured as a hollow plate having an antioxidant gas flow passage formed therein; a hole that is provided in the base portion to allow a capillary to be inserted therein or removed therefrom and that communicates with the antioxidant gas flow passage; and a heater mounted on an outer surface of the base portion. The antioxidant gas flow passage includes a first flow passage provided in the vicinity of the outer surface of the base portion on which the heater is mounted. This antioxidant gas blow-off unit to be installed in a wire bonding apparatus heats free air balls effectively with a compact structure. |
| 申请公布号 |
US2015214180(A1) |
申请公布日期 |
2015.07.30 |
| 申请号 |
US201514678094 |
申请日期 |
2015.04.03 |
| 申请人 |
Shinkawa Ltd. |
发明人 |
SAKAKURA Mitsuaki;MAEDA Toru |
| 分类号 |
H01L23/00;B23K3/08 |
主分类号 |
H01L23/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An antioxidant gas blow-off unit comprising:
a base portion configured as a hollow plate having an antioxidant gas flow passage formed therein; a base portion configured as a hollow plate having an antioxidant gas flow passage formed therein; a hole provided in the base portion to allow a capillary to be inserted thereinto or removed therefrom, the hole communicating with the antioxidant gas flow passage; and a heater mounted on an outer surface of the base portion, wherein the antioxidant gas flow passage comprises a groove-like first flow passage provided in the vicinity of the outer surface of the base portion on which the heater is mounted. |
| 地址 |
Tokyo JP |
