发明名称 |
E-FUSE STRUCTURE WITH METHODS OF FUSING THE SAME AND MONITORING MATERIAL LEAKAGE |
摘要 |
The present disclosure generally provides for an e-fuse structure and corresponding method for fusing the same and monitoring material leakage. The e-fuse structure can include a metal dummy structure and an electrical fuse link substantially aligned with a portion of the metal dummy structure, wherein the metal dummy structure cools at least part of the electrical fuse link in response to an electric current passing through the electrical fuse link. |
申请公布号 |
US2015214149(A1) |
申请公布日期 |
2015.07.30 |
申请号 |
US201414165039 |
申请日期 |
2014.01.27 |
申请人 |
Internatioal Business Machines Corporation ;Samsung Electronics Co., Ltd. ;GLOBAL FOUNDRIES, Inc. |
发明人 |
Moy Dan;O Sung Kwon;Son Kihwang;Zhang Xiaoqiang |
分类号 |
H01L23/525;G01R31/02;H01L23/367;H01L21/321;H01L23/532;H01L23/522 |
主分类号 |
H01L23/525 |
代理机构 |
|
代理人 |
|
主权项 |
1. An e-fuse structure comprising:
a metal dummy structure; and an electrical fuse link substantially aligned with a portion of the metal dummy structure, wherein the metal dummy structure cools at least part of the electrical fuse link in response to an electric current passing through the electrical fuse link. |
地址 |
Armonk NY US |