| 发明名称 |
WAFER-SCALE TESTING OF PHOTONIC INTEGRATED CIRCUITS USING HORIZONTAL SPOT-SIZE CONVERTERS |
| 摘要 |
Disclosed herein are methods, structures, and devices for wafer scale testing of photonic integrated circuits. |
| 申请公布号 |
US2015214122(A1) |
申请公布日期 |
2015.07.30 |
| 申请号 |
US201314103659 |
申请日期 |
2013.12.11 |
| 申请人 |
Acacia Communications Inc. |
发明人 |
VERMEULEN Diedrik;CHEN Long;DOERR Christopher |
| 分类号 |
H01L21/66;G02B6/13 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for the wafer-scale testing of photonic integrated circuits comprising:
fabricating on a wafer a plurality of photonic integrated circuits; fabricating on the wafer a test circuit associated with one of the individual chips; and operating the test circuit such that a plurality of photonic integrated circuits fabricated on the wafer are tested. |
| 地址 |
Maynard MA US |
