WET STATION

摘要

There is provided a wet station including: a loading unit to and from which a front open unified pod (FOUP) in which semiconductor wafers are installed and a stocker in which dummy wafers are installed are loaded and unloaded; a wafer transferring robot removing the semiconductor wafers from the loaded FOUP and loading the semiconductor wafers into a wafer guide; a dummy transferring robot removing the dummy wafers from the loaded stocker and loading the dummy wafers into empty slots of the wafer guide in which the semiconductor wafers have not been loaded; and a processing chamber receiving the wafer guide fully loaded with the semiconductor wafers and the dummy wafers and performing a cleaning process on the semiconductor wafers.

主权项

1. A wet station, comprising:
a loading unit to and from which a front open unified pod (FOUP) in which semiconductor wafers are installed and a stocker in which dummy wafers are installed are loaded and unloaded; a wafer transferring robot removing the semiconductor wafers from the loaded FOUP and loading the semiconductor wafers into a wafer guide; a dummy transferring robot removing the dummy wafers from the loaded stocker and loading the dummy wafers into empty slots of the wafer guide in which the semiconductor wafers have not been loaded; and a processing chamber receiving the wafer guide fully loaded with the semiconductor wafers and the dummy wafers and performing a cleaning process on the semiconductor wafers.