| 发明名称 |
SUPPORT DEVICE FOR A PLURALITY OF WAFERS FOR A VERTICAL OVEN |
| 摘要 |
This support device has a central axis and includes: three uprights extending substantially parallel to the central axis, a plurality of series of support members spaced along the central axis, each series of support members comprising three support members adapted to support one wafer of the plurality of wafers and extending in different essentially longitudinal directions transverse to the central axis, each support member being mounted directly on a separate upright, this support device being remarkable in that the directions of the three support members of each series of support members are concurrent at a point on the central axis. |
| 申请公布号 |
US2015211800(A1) |
申请公布日期 |
2015.07.30 |
| 申请号 |
US201314425549 |
申请日期 |
2013.08.20 |
| 申请人 |
Soitec |
发明人 |
Gourdel Christophe;Barthelemy Alexandre |
| 分类号 |
F27D5/00 |
主分类号 |
F27D5/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A support device for a plurality of wafers, the support device being adapted to be loaded into a heat treatment oven, the support device having a central axis, the support device including:
three uprights extending substantially parallel to the central axis, a plurality of series of support members spaced along the central axis, each series of support members comprising three support members adapted to support one wafer of the plurality of wafers and extending in different essentially longitudinal directions transverse to the central axis, each support member being mounted directly on a separate upright, the directions of the three support members of each series of support members being concurrent at a point on the central axis. |
| 地址 |
Crolles Cedex FR |
