PEDESTAL AND METHOD FOR CONTROLLING THE SAME, TRAY, AND PROCESS CHAMBER

摘要

A pedestal and a method for controlling the same, a tray, and a process chamber are provided. The pedestal comprises: a barrier (12), defining a plurality of areas, in which the plurality of areas are electrically insulated and thermally insulated from each other;a plurality of subbases (11), disposed in the plurality of areas respectively; and a control device, configured for controlling a temperature and/or a power of each subbase(11).