Surface Delayering with a Programmed Manipulator

摘要

A method and apparatus for use in surface delayering for fault isolation and defect localization of a sample work piece is provided. More particularly, a method and apparatus for mechanically peeling of one or more layers from the sample in a rapid, controlled, and accurate manner is provided. A programmable actuator includes a delayering probe tip with a cutting edge that is shaped to quickly and accurately peel away a layer of material from a sample. The cutting face of the delayering probe tip is configured so that each peeling step peels away an area of material having a linear dimension substantially equal to the linear dimension of the delayering probe tip cutting face. The surface delayering may take place inside a vacuum chamber so that the target area of the sample can be observed in-situ with FIB/SEM imaging.

主权项

1. An apparatus for in-situ delayering of a sample for fault isolation and defect localization, comprising:
an optical device for producing a beam along an optical axis; a vacuum chamber; a motion stage located with the vacuum chamber for supporting a sample for surface delayering, the motion stage being movable relative to the optical axis; and an actuator having a delayering probe tip for removing a layer of material from a surface of the sample.