SINGLE ULTRA-PLANAR WAFER TABLE STRUCTURE FOR BOTH WAFERS AND FILM FRAMES

摘要

A wafer table structure providing a single wafer table surface suitable for handling both wafers and film frames includes a base tray having a set of compartments formed therein by way of a set of ridges formed in or on an interior base tray surface; a hardenable fluid permeable compartment material disposed within the set of base tray compartments; and a set of openings formed in the base tray interior surface by which the hardened compartment material is exposable to negative or positive pressures. The base tray includes a first ceramic material (e.g., porcelain), and the hardenable compartment material includes a second ceramic material. The base tray and the compartment material are simultaneously machinable by way of a standard machining process to thereby planarize exposed outer surfaces of the base tray and the hardened compartment material at an essentially identical rate for forming a highly or ultra-planar wafer table surface.

主权项

1. A wafer table structure providing a wafer table surface suitable for handling wafers, portions of wafers, and/or film frames on which wafers or portions thereof, the wafer table structure comprising:
a base tray comprising a first set of exposed upper surfaces, an interior surface, and a set of compartments formed integrally with or attached to the interior surface, the base tray formed of at least one type of material that is gas or fluid impermeable in response to applied negative pressures; at least one type of compartment material disposed within the set of base tray compartments, the at least one type of compartment material conformable to the set of compartments and hardenable to provide a hardened compartment material in the set of compartments that is gas or fluid permeable in response to applied vacuum forces, and which provides a second set of exposed upper surfaces; and a set of openings formed in the interior surface of the base tray, by which the hardened compartment material is exposable to negative pressures or positive pressures, wherein (a) the first set of exposed upper surfaces of the base tray and (b) the second set of exposed upper surfaces of the hardened compartment material are simultaneously machinable by way of a common machining process to provide a planar wafer table surface for carrying wafers and film frames.