| 主权项 |
1. A processing liquid nozzle that supplies a processing liquid to a substrate, the processing liquid nozzle comprising:
a hollow nozzle body; a processing liquid flow space formed inside the nozzle body; and a processing liquid flow path configured to connect a processing liquid ejection port formed in a lower portion of the nozzle body and the processing liquid flow space with each other, the processing liquid flow path perforating the nozzle body in a vertical direction, wherein the processing liquid flow path includes a foreign matter collecting space which is formed below an upper end of the processing liquid flow path so as to sediment and collect foreign matters in the processing liquid. |
