ACCELERATION SENSOR

摘要

This acceleration sensor has a detection element, a counter electrode and an upper cover. The detection element includes an active layer, a base layer, an oxide film layer that is provided between the active layer and the base layer, a first insulating layer, a contact section, and a self diagnostic electrode. The first insulating layer is provided on the active layer side that is the reverse side of the oxide film layer, and has a first opening provided therein. The contact section is provided on a part of the first insulating layer, said part being on the reverse side of the active layer, and has a first metal layer that is connected to the active layer via the first opening. The counter electrode is provided at a position facing the self diagnostic electrode, and the upper cover supports the counter electrode.