PROBER, AND APPARATUS FOR POLISHING NEEDLE TIP OF PROBE CARD

摘要

PROBLEM TO BE SOLVED: To provide a prober which makes it possible to press a polished face of a needle tip against each probe needle of a probe card without fault.SOLUTION: A prober 10 comprises: a probe card 16 having probe needles 17; and a needle tip polishing unit 24. The needle tip polishing unit 24 has: a WAPP 28 which is brought into contact with a needle tip; and a support member 27 for supporting the WAPP 28. The WAPP 28 has a wrapping sheet 29 provided on its upper surface, and concave parts 31 formed in a bottom face 30. The support member 27 has convex parts 33 formed on its ceiling face 32. With the WAPP 28 placed in a standby position, the convex parts 33 are engaged with the concave parts 31. When the WAPP 28 is moved to a contact position, the top of each convex part 33 abuts against a part of the bottom face 30 where the concave parts 31 are not formed.