PRINTING OF COLORED PATTERN USING ATOMIC LAYER DEPOSITION

摘要

An apparatus for depositing a layer of material at different thicknesses on a substrate using atomic layer deposition (ALD) to form patterns that exhibit different colors. The patterns may be formed using a printer head that moves in a two-dimensional plane over the substrate along a path while injecting the precursor gases onto the substrate. Patterns are formed on the substrate along the path along which the printer head moves. The refraction of light incident on the layer of material on the substrate causes the deposited material to exhibit different colors. The color change is caused by thin-film interference caused by interference with light waves reflected by the upper and lower boundaries of the deposited material.