发明名称 |
METHOD FOR PRODUCING THIN FILM CONTAINING MOLYBDENUM, THIN FILM-FORMING STARTING MATERIAL, AND MOLYBDENUM IMIDE COMPOUND |
摘要 |
In the method of the present invention for producing a thin film, including introducing, onto a substrate, a vapor that has been obtained by vaporizing a thin-film-forming material including a molybdenum imide compound represented by the following formula (I) and that includes the molybdenum imide compound; and then forming a thin film including molybdenum on the substrate by decomposing and/or chemically reacting the molybdenum imide compound. (In the formula, R1 though R10 each represent a hydrogen atom or a linear or branched alkyl group having 1 to 5 carbon atoms, and R11 represents a linear or branched alkyl group having 1 to 8 carbon atoms.) |
申请公布号 |
SG11201501107X(A) |
申请公布日期 |
2015.07.30 |
申请号 |
SGX11201501107 |
申请日期 |
2013.10.15 |
申请人 |
ADEKA CORPORATION |
发明人 |
SATO, HIROKI;UEYAMA, JUNJI |
分类号 |
C23C16/40;C07F11/00;C07F17/00 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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