OPTICAL METHOD AND SYSTEM FOR MEASURING ISOLATED FEATURES OF A STRUCTURE

摘要

An optical method and system are presented for use in measurement of isolated features of a structure. According to this technique, Back Focal Plane Microscopy (BFM) measurements are applied to a structure and measured data indicative thereof is obtained, wherein the BFM measurements utilize dark-field detection mode while applying pinhole masking to incident light propagating through an illumination channel towards the structure, the measured data being thereby indicative of a scattering matrix characterizing scattering properties of the structure, enabling identification of one or more isolated features of the structure.

主权项

1. An optical method for use in measurement of isolated features of a structure, the method comprising:
applying Back Focal Plane Microscopy (BFM) measurements to a structure and obtaining measured data indicative thereof, said BFM measurements comprising performing dark-field detection mode while applying pinhole masking to incident light propagating through the illumination channel towards the structure; and processing the measured data and obtaining data characterizing scattering of said incident light from an illuminated spot on the structure, thereby enabling identification of an isolated feature of the structure.