| 摘要 |
The purpose of the present invention is to detect foreign matter or the like present in a target, at higher resolution and with greater reliability. Frame data for a plurality of fault planes parallel to the scanning direction which have been established in a space between an X-ray tube (31) and an X-ray detection device (22) is created on the basis of detected frame data. Creation takes place in accordance with the spread of the fan shape of the X-ray beam, and difference in position of the plurality of fault planes in the height direction from the detection plane. On the basis of a laminography method, fault images are respectively created from the frame data for the plurality of fault planes. Edge information commensurate to change in pixel values in the fault images is computed for each pixel, and a three-dimensional distribution of the edge information is created. This edge information is searched in a direction that passes through the plurality of fault planes. As a result of the search, pixels that exhibit maximum values of edge information are detected, and only those pixels that, of the plurality of fault images, are those corresponding in location to the detected pixels are synthesized into a single synthesized image. |
