发明名称 |
DEVICE AND METHOD FOR ALIGNING SUBSTRATES |
摘要 |
A method for aligning and bringing a first substrate into contact with a second substrate as well as a corresponding device with at least four detection units wherein: at least two first detection units can move at least in the X-direction and in the Y-direction, and at least two second detection units can move exclusively in the Z-direction. |
申请公布号 |
SG11201406979V(A) |
申请公布日期 |
2015.07.30 |
申请号 |
SG11201406979V |
申请日期 |
2013.12.06 |
申请人 |
EV GROUP E. THALLNER GMBH |
发明人 |
WAGENLEITNER THOMAS;WAGENLEITNER, THOMAS |
分类号 |
H01L21/68;G01B11/27;H01L21/673 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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