| 摘要 |
<p>The present invention provides a ceramic substrate and a manufacturing method thereof. According to an embodiment of the present invention, the ceramic substrate includes aluminum and a nitride layer including an upper surface and a lower surface facing each other, From the inside of the nitride layer to the upper surface of the nitride layer, the nitrogen concentration decreases while the concentration of oxygen atoms, hydrogen atoms, and chlorine atoms increases.</p> |
