| 摘要 |
The purpose of the present invention is to improve the rate of collection of a refining target gas from a gas refining apparatus that uses a PSA unit and to achieve both purity and collection rate with good power efficiency. A gas refining apparatus connected so as to allow pressure swing operation for alternately performing an adsorption process and a desorption process, wherein: the miscellaneous gas discharge line (L3) is provided with a membrane separation device (M), which has a separation membrane (M1) through which the refining target gas does not pass but miscellaneous gases do pass and which separates the refining target gas from the miscellaneous gases at the exhaust pressure of the adsorbers (A1 - A4); and a regenerated gas return line (L5) for returning regenerated gas, in which the concentration of the refining target gas has been increased in the separation membrane (M1), to the source gas supply line (L1) is provided. |
