LARGE CAPACITY EVAPORATION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME

摘要

The present invention relates to a large capacity evaporation source and a deposition apparatus having the same. According to the present invention, a large capacity evaporation source may comprise: a housing; a lower crucible installed inside the housing, wherein a evaporation material is accommodated, and formed to be lengthened to the front and the rear; an upper crucible coupled to an upper portion of the lower crucible, wherein an injection nozzle injecting the evaporation material is formed in an upper end; and a guide plate installed inside the upper crucible and guiding the evaporation material which is concentrated to a central portion to be evaporated to be moved to the front and the rear.