发明名称 |
METHOD FOR FORMING MAGNESIUM OXIDE THIN FILM AND PROCESSED PLATE |
摘要 |
A method for depositing a magnesium oxide thin film on a substrate by a laser abrasion method using a sintered body or single crystal of magnesium oxide as a target. In this method, a flat processed film made of magnesium oxide having a (111) plane as its front surface is prepared, using a substrate made of strontium titanate having a (111) plane as its principal surface or yttria-stabilized zirconia having a (111) plane as its principal surface, by directly depositing a film on the principal surface of the substrate and epitaxially growing the film. |
申请公布号 |
EP2754737(A4) |
申请公布日期 |
2015.07.29 |
申请号 |
EP20120829861 |
申请日期 |
2012.03.09 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
SUSAKI TOMOFUMI;HOSONO HIDEO;FUJIHASHI TADAHIRO;TODA YOSHITAKE |
分类号 |
C30B29/16;B01D53/02;B01D53/04;B01J20/04;B01J21/10;C23C14/08;C23C14/28;C30B23/06 |
主分类号 |
C30B29/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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