| 摘要 |
<p>[Problem] To provide a shape measurement device that can measure both contours over a wide measurement range, and tiny asperities. [Solution] The shape measurement device is designed to measure surface contours and surface roughness of a measured surface, and is provided with an arm that swings about a support part as the fulcrum point; a sensing pin positioned contacting the measured surface, and experiencing vertical displacement according to the surface profile of the measured surface; and a displacement sensor and a scale type detector for detecting displacement due to swinging of the arm. The sensing pin is situated at a first end at one end of the arm, the displacement sensor and the scale type detector are at least partly situated at a second at the other end portion of the arm, and the support part is situated closer towards the second end side, with respect to the center of the arm.</p> |
