| 摘要 |
<p>The device has implanted resistors (41, 43, 45, 47) connected as a Wheatstone bridge. First two opposite resistors (45, 47) of the bridge is covered with an array of metal lines parallel to a direction. The direction is such that a variation in the substrate stress along the direction causes a variation of an unbalance voltage (V OUT) of the bridge. Second opposite resistors is covered with an array of metal lines parallel to another direction orthogonal to the former direction. The metal lines are made of copper or aluminum.</p> |
