PUMP FOR CONTROLLING OF A FLUID AND METHOD OF FABRICATING THE SAME

摘要

According to an embodiment of the present invention, a hydraulic control pump comprises: a chamber having an inner receiving space and having a first hole to discharge a fluid contained therein; and a MEMS device received inside the receiving space of the chamber and where displacement is generated by a plurality of material layers having different thermal expansion coefficient. The fluid flows by the displacement generated in the MEMS device to be discharged to the outside through the first hole.