发明名称 DBDプラズマ法のための電極及び装置
摘要 <p>A planar electrode for the DBD plasma treatment of a surface comprises a metal casing (8) raised to a high voltage and provided with an active part (2) intended to be placed in parallel with a surface to be treated (27). This active part (2) is covered on the outside by a sheet (4) of dielectric material to which it is fixed by a polymer layer (6). The internal face of the active part (2) forms with the metal casing (8) a heat exchanger connected to a secondary cooling circuit (34) through which a refrigerant (10) circulates.</p>
申请公布号 JP5756514(B2) 申请公布日期 2015.07.29
申请号 JP20130506643 申请日期 2011.04.27
申请人 发明人
分类号 H05H1/24;H01J37/32 主分类号 H05H1/24
代理机构 代理人
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