发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The present invention relates to a method for manufacturing a semiconductor device to prevent a false report about an external test of a semiconductor device by controlling the change of a surface condition of a gold-plating electrode. The method of manufacturing the semiconductor device forms a gold-plating electrode consisting of multiple gold-plating layers which are accumulated by alternately repeating a step of performing a crystal growth of a plating layer by applying electricity between an anode and a cathode included in a processing cup of a plating device when a gold-plating electrode is formed (current carrying on) and a step of performing a crystal growth of the plating layer without applying the electricity between the anode and the cathode (current carrying off). Accordingly, the method of manufacturing the semiconductor device may maintain the surface condition for roughness as 0.025 rad degrees by controlling change of a surface condition of the gold-plating electrode even if the component of a plating solution is changed. As a result, the method can reduce a false report about an external test of a semiconductor device due to change of the brightness of the gold-plating electrode in the external test of the gold-plating electrode.
申请公布号 KR20150087107(A) 申请公布日期 2015.07.29
申请号 KR20150002519 申请日期 2015.01.08
申请人 RENESAS ELECTRONICS CORPORATION 发明人 MURAKAMI YOSHINORI;FUKUMA HITOSHI;KANAOKA TAKU
分类号 H01L21/288;H01L21/28;H01L21/768 主分类号 H01L21/288
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