发明名称 圧電アクチュエータ素子の製造方法
摘要 <p>The invention relates to debinding and sintering a plurality of stack arrangements (100) of piezoelectric actuator components (1), wherein the stack arrangements (100) are disposed lying adjacent to each other on a support fixture (200), such as a support plate. The stack arrangements (100) can be disposed in receptacle devices (300) and covered by cover devices (400). A mesh or web-like formed material or perforated sheet metal made of copper can be used as the contact surfaces (310, 410) of the receptacle and cover devices. The construction causes nearly homogeneous ambient conditions on all side surfaces of the actuator components (1) during the debinding and/or sintering.</p>
申请公布号 JP5756189(B2) 申请公布日期 2015.07.29
申请号 JP20130558333 申请日期 2012.01.26
申请人 发明人
分类号 H01L41/273;H01L41/083;H01L41/09;H01L41/43 主分类号 H01L41/273
代理机构 代理人
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