| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing filmy glass with a film which has a film formed on both sides of filmy glass and is suppressed from warping. <P>SOLUTION: Filmy glass 1 is held perpendicularly to a surface 2a of a target 2 and has both surfaces 1a, 1b of the filmy glass 1 and film-formed while passing over the target 2. Especially, it is preferred that the filmy glass is film-formed by a sputtering method, CVD method, or vacuum deposition method. Further, it is preferred that the filmy glass has both the surface film-formed while circling along a track passing over the target. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
